Comparison

10 contributions

Characteristics and Performance of MEMS Thermal Convective Accelerometers

August 2021Published Engineering Mariana Amorim Fraga

A comparison among MEMS thermal accelerometers reported from 1997 to 2021.

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Mukherjee, Rahul, Joydeep Basu, Pradip Mandal, and Prasanta Kumar Guha. “A Review of Micromachined Thermal Accelerometers.” Journal of Micromechanics and Microengineering 27, no. 12 (November 16, 2017): 123002. doi:10.1088/1361-6439/aa964d.
Wang, Xiaoyi, Wei Xu, Huahuang Luo, and Yi-Kuen Lee. “Theoretical Modeling, Numerical Simulations and Experimental Study of Micro Thermal Convective Accelerometers.” Journal of Microelectromechanical Systems 28, no. 5 (October 2019): 790–798. doi:10.1109/jmems.2019.2930065.
Wang, Xiaoyi, Yi-Kuen Lee, and Wei Xu. “A Reliable Liquid-Based CMOS MEMS Micro Thermal Convective Accelerometer With Enhanced Sensitivity and Limit of Detection.” Journal of Microelectromechanical Systems (2021): 1–7. doi:10.1109/jmems.2021.3087617. https://www.orkg.org/orkg/contribution-editor?contributions=R139940,R139944,R139947,R139950,R139953,R139956,R139959,R139962,R139968,R139971

Comparison

Characteristics and Performance of MEMS Thermal Convective Accelerometers

References